WebAerospace customer noticed that a cryopump installed on a large vacuum chamber would not pump down below 10 -5 range. Additionally he found oil contaminants on the 80K array. While there is oil used in the cryogenic system in the compressor and it can contaminate the helium circuit, this oil can not physically reach the vacuum vessel. http://www.highvacuum.com/wp-content/uploads/2015/02/cti_cryogenics_cryopump_brochure.pdf
Trillium US Inc. Cryo-Plex 16® Cryogenic High Vacuum …
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[Basic Knowledge about Cryopumps 1 ] ULVAC …
WebJan 14, 2013 · ©2013 Brooks Automation Inc. Pub. No. 8040613, Rev. AA, 01/14/2013 ECO No. 63723 3-v Cryo-Torr® Pump Installation, Operation and Maintenance Instructions WebCryopump Repair, Rebuilt Cryopumps, Compressor Rebuilds & Maintenance Service, Refurbished Cryogenic Vacuum Equipment, Installation & Maintenance of Vacuum Systems . Brooks CTI Cryogenics … Web1.Cautions about pressure. A cryopump can store large amount of condensable gases inside. However, it is dangerous to warm up a sealed cryopump as the inner pressure may reach several MPaG. To prevent an explosion, CRYO-U cryopump is provided with a pressure relief valve which starts opening at 10kPa (gage) and fully opens at 20kPa (gage). tampa business and wealth